I am trying to figure out a way of calculating the dielectric constant of a thin film of Yb2O3 on ITO. Assuming that the thickness of the Yb2O3 is known and that it's
Dielectric functions are intrinsic properties of each material and do not generally depend on other materials within the device.
There is no such thing as the dielectric functions of the combined system. The system must be studied as a stack of materials, each material with well defined dielectric functions.
Now, out of the ideal world, every thin film material optical properties depend on the deposition method and underlying materials. For example: in ITO, the ratio of oxide, tin and indium has a profile that depend on deposition method. Also, in certain cases, a "combined" dielectric function does exist (effective dielectric function), but this depends, among others, on the sample characteristics and the wavelength regime (dielectric "constants" are not constants, they are wavelength dependent).
Saying the above, as a first step, you can use material's dielectric functions from the literature and simulate the system response.
How to model the system? it depends on what do you want to model.
How to measure the dielectric functions? It depends on the sample characteristics and wavelength regime. Ellipsometry is usually the best way to go.
See the following article on the determination of dielectric functions on a stack system, as well as the modeling of the combined system:
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