In my opinion, theoretically there are two ways:

1. It is necessary to form a dielectric surface on the surface of the substrate. For example (Au2O3).

2. Lowering the substrate temperature.

If you think with simple logic....adatoms are getting sufficient energy to pin the substrate surface...now you need to think ways to control that kinetic energy....reduce the power (source), increase the resistance in path ( gas pressure)...temperature of the substrate, apply field opposite to the motion of particles ( substrate biasing)

In my opinion, you can use Cytop as a surface passivation. Because surface passivation done by using Cytop has long durability.

Sara Ghomi Никак. Только покрыть металлом, который не взаимодействует с теллуром, например иридием.