When I am running TMS derivatives of some phenolic compounds on TG-5MS column, I am getting intense peaks of siloxane in my chromatogram. The injection port temperature is 250°C, and oven starts from 100°C and ends at 250°C.
It may be you need to keep the final temperature at a longer time, or a slight increase in temperature after completion of run. Also, take a look at the injection port.
You haven't completely removed the reactant (TMS), your injection port is probably not derivatized and your column is most likely old. You will see siloxane to a certain extent under the best of conditions, but without very careful control of the chromatographic system you will certainly see a great deal of siloxane.