Hi
I am currently working on a mini-project that must be presented at the end of term. The objective is to fabricate a 32 nm GsAs n-MESFET using silvaco software. The version of silvaco that I am using is 2012 and from this viewpoint, it's programming environment is different from other versions. I think in previous versions coding was very simple since there were GUIs for this purpose and it's not necessary to type codes directly within environment. Does anyone have papers or projects related to this subject like issues of implantation, deposition and everything is needed to understand process of fabrication theoretically in order to simulate it in silvaco? I wait for your guidance
Thanks