I was wondering if anybody would have tried surface charge measurement of teflon coated on silicon. We are making an electret film using teflon. The idea is a thin layer (250 nm) of teflon is coated on silicon and the film is kept under the corona discharge setup. Our intention is to make an electret film by entrapping the surface charge which comes from the corona discharge. The main challenge is to measure the surface entrapped charges in the film. There are few papers on electrostatic voltmeter by which surface charge has been measured, but I have no idea whether that would work for us. If anybody can help in this regard it will be very helpful.
We use a kelvin probe for ex-situ surface potential measurements of dielectric films deposited on Si substrate. It's a non contact method and it works well. it could work for your films as well.
How about a CV measurement? --- similar to that of measuring the CV of a MOS structure.
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