In this link you can find a complete and clear review about aluminium anodizing:

http://www.wiley-vch.de/books/sample/3527318763_c01.pdf

Thank you. Do you have any literature on barrier-type anodisation of Al?

In this work, the first part is about barrier-type films:

http://www.sciencedirect.com/science/article/pii/S0040609096094400

Hi Leszek,

Aluminum anodizing uses fairly aggressive wet chemistry, and generally is done on complete surfaces.  regions can be masked so that they do not anodize, again usually on a large area sort of scale. I think this technology would be challenging to implement at transistor like scales.

   The problem that you will encounter, which will be much worse at the small scale is auto-oxidation of aluminum.  no fresh surface of aluminum will remain a pure conductor for very long. The accumulation of Aluminum oxide at the surface will convert it over time from a conductor to a semi-conductor to an insulator.  The rate of this change is driven by a number of external factors.   As a result of this oxidation , Aluminum is also difficult to make a solder connection to.

In short there are reasons that aluminum is typically not used in integrated circuit manufacturing.

Regards,

Brian