I have a 0.5 um nickel structure, and I need to coat it with gold. I used a chemical coating but the nickel layer has peeled completely. I wonder if it's possible to coat the nickel using the sputtering process?
Yes, it is possible to coat the nickel with either gold or Pt with sputtering process. The sputtering process does not require heat and working under vacuum condition, it should not affect your nickel structure. I have deposited Pt on Ni before, it works.