Nanomafacturing is a subdomain of advanced manufacturing. It is an emergent topic for mechanical engineering. This is a combined course for both under and grads.
You should teach students about template assisted nanofabrication - it has many advantages and has much contribution in science. for example check nanofabrication with anodic alumina templates.
I think the topics already suggested have very strong impact and you should consider them while designing your course content. But I think you should include some parts like nanodispersed systems, various synthesis methods, lithography techniques like etching, patterning.