Can the FE-SEM TESCAN MIRA4 reach a resolution of 1 or 2nm? is it possible?
May I know if someone has tried it already. If someone has tried it, may I have the procedure for getting a 1 or 2nm image.
Thank you.
1) The resolution of a SEM is specified by the vendor for certain conditions (e.g. 30kV) on a test sample (e.g. Au on carbon). If you use a SEM the resolution was demonstrated during installation, after maintenance by the service! For lower beam voltages the resolution values may be worse (more nm, some nm). You should find values in the technical data sheet. It's challenging to get the specified values, but it's a good training (a standard sample is required).
2) You can't expect to get the best resolution values on every sample! Limiting factors are electron scattering, roughness, composition, layer thickness, detector....
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