It is indeed possible to achieve nanogaps in the order of 5 nm between electrodes.

Complications arise depending on the geometry - for example high-surface area planar nanogaps are incredibly difficult compared to say a triangular break junction.

If you could provide a little more information it will be easier for myself and others to provide a refined answer. For instance, what sort of geomertry are you after, dimensions, substrate and electrode materials?

Below is my thesis - you'll find examples of fabrication methods in chapters 4 and 5 and more importantly a host of references to reviews and key work.

Kind regards,

Jules

Thesis Micro- and nanogap based biosensors.

Hi Sankara,

My team also found thesis of Jules is very informative and good source of information for nanogap based devices. I especially impressived about l the nanofabrication part from this thesis.

I therefore recommend you to read it throughly , at least for the fabrication fart, then you can find a suitable appoarch to make 5 nm gap.

Moreover, If you can send your design ( to my email), then we can consider it right the way if we can make and supply the required nanogap chips for your research. It will save your time on fabrication and you can spend it on experiments.

Greetings

Hien

Maybe you could also try to use FIB?