Does refractive index of amorphous SiNx change with film thickness (thickness varied by etching)?

Abu Naushad Parvez @Abu-Naushad-Parvez

26 June 2023 1 8K Report

Dear Colleagues

Could you please assist me with my question? Any peer-reviewed paper or thesis reference should be sufficient.

Thanks

Parvez

Krzysztof Chmielewski

Generally, yes, but it depends on the method of deposition. In the case of PECVD nitride, there will be a gradient of hydrogen concentration, resulting in a lower RI in the upper layer.

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