I am looking forward to deposit LSMO thin films on lithium niobate substrate and in the literature, the temperature mentioned is quite high. I am interested to know if this high temperature processing could affect the SAWs transmission through the substrate. If yes, what could be an alternative approach to do so?
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about what temperatures are you talking? LN is quite stable up to substantial temperatures.
The most typical defect that happens is out-diffusion of LiO2 leading to an increased lithium deficit, which may influence some properties. But Li mobility is only getting relevant at very high temperatures >>500°C and at longer times (>> h). You should check diffusion measurements.
Further, I am not sure, if the Lithium content influences the accoustical/mechanical/piezoelectric properties as much, as it does the optical properties. So even some out-diffusion may be no problem.
Keep in mind, diffusion in the other direction may be relevant as well. Depending on your deposition enviroment and the avaiable atoms various metals may diffuse into LN in reverse, e.g. Fe.
Diffusion of e.g. Ti for optical waveguide fabrication often happens at >1000°C and is not seen as a problem for optical properties, if some precautions are taken.
Dear Michael,
Thank you for the response. The ambient environment is oxygen during and after the deposition, and the temperature range is 600-750 degrees Celsius, so I believe it won't affect anyway.
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