I want to fabricate a Aluminum microcantilever to 70micron length, 10microns width with 1micron thickness using MEMS on a Silicon wafer. I want fabricate this to study the size effects in aluminum. I have DC sputtering machine, photolithography and spin coater. Anybody has a idea, how to fabricate with single mask. I donot have any dry etching setup but I can do wet etching.
Shailendra kumar Tiwari
It is possible using SOIMUMPS process available in coventorware. But using wet etching will give sticktion problem. But there are way to overcome it.
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