I deposit Ag on Si substrates using thermal evaporation technique and the thickness results are not consistent. Scotch tape test has shown that the adhesion of Ag to the substrate is quite poor. I have used Al as the interlayer, also changed the substrate to SiO2, but did not help. I wonder if this poor adhesion could impact the final thickness of the thin film that I measure using AFM? Any suggestions on improving the adhesion of Ag to the substrate is also very appreciated? Thanks in advance.

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