I am trying to know more theories and mechanisms about thin film growth? Does anyone list some reading recommendation about it and give your reason why these books are better? I found a book called Materials Science of Thin Films: Deposition and Structure by Milton Ohring, is it suitable for me?
Try to read the classic book.
"Handbook of thin film technology" by Maissel and Glang.
There is another book by R. F. BUnshah, I don't have the title.
Another book, but very old "thin film phenomena" by K. L. Chopra
K. Sreenivas
I concur with mr. Sreenivas that Maissel & Glang is a good handbook.
You can also try: "Handbook of plasma processing" by Rossnagel, Cuomo and Westwood or the older but much referenced "Thin film processes" by Vossen.& Kern
Physics of Crystal Growth by Pimpinelli and Villain is a good reference to understand crystalline thin film growth mechanisms and associated surface physics.
https://www.cambridge.org/core/books/physics-of-crystal-growth/226DAEF925D87135F1BFE8CE8AB96896
The Materials Science of Semiconductors by Angus Rockett explains thin film growth process in chapter 10.
- Badges
- Science topic
- Similar topics
- Physical Sciences
- Materials Science