How can we extract Dit from CV and GV curves at different frequencies?
I have measured CV and GV curves at different frequency for Al/HfO2/Si MOS capacitors. I want to extract Dit, Nit from it. I have attached a file containing measured value of conductance (G) and capacitance (C) at different voltage at 1 MHz frequency
You can compare the measured C-V values at Low and High Frequency: Chf and Clf. Then use a model like:
Cit=(1/Clf - 1/Cox)^-1 - (1/Chf - 1/Cox)^-1
Then you can extract Dit = qCit.
Please refer to either of the following books:
1.) Semiconductor Material and Device Characterization by Dieter K. Schroder
2.) MOS Physics and Technology by Nicollian and Brews
3.) Physics of Semiconductor Devices by SM Sze
Hi Savita Maurya ,
I also want to draw energy distribution curves of Dit. If you know the method, can you please share with me?
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