I wish to grow MoS2 on 300 nm Sio2/Si for example by MBE. But I could not find the literature related to growth by this technique. I know there are other methods like CVD, MOCVD but I understand that MBE has more precise control over the growth. I wonder if there are any technical issues to grow this material in high purity environment. If someone has tried this technique, please give me feedback on the growth conditions.

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