Does anybody know how I can deposit GaN by sputtering with Ga target?

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Yuriy Kudriavtsev

Everybody looking for a method to growth GaN!

Saman Gheytani

So, there is no approved way to do that. right?

Daniela Gogova

For sputtering you need GaN target prepared by sintering from GaN powder (the commercial one has large content of oxygen).

If preparation of GaN target is expensive for you try to develop a plasma source to make atomic N from N2 (which is not reactive at your conditions). Try to use ozone as well.

Cyril Robinson Azariah J.

Try using Pulsed Laser Deposition, with N2 gas as carrier....