I haven't used the polymer you mention, but I've used another conductive polymer branded "e-spacer", to do EBL on dielectric substrates. E spacer doesn't require baking after spin coat. After the EBL writing, e spacer can be removed in DI water before developing the underlying PMMA. 

https://snf.stanford.edu/SNF/processes/process-modules/ebeam-resists/e-spacer-300z/view

I also don't use PEDOT, but I use AquaSAVE (also waterbased solution) http://www.mrany.com/data/HTML/20.htm

I bake it for 60s @ 100°C at hotplate to remove water if there is some remaining, but maybe it is not necessary...

Thank you for your answers. I am currently facing the adhesion issue between PMMA and PEDOT, the PEDOT is not wetting the surface and hence not coating

The wetting of AquaSAVE to PMMA is modarate, so sometimes I have quite nicely coated samples, sometimes just in the middle (where I need that and where I put the initial drop)...try some fast O2 plasma or ozone treatment (but really short) prior to PEDOT coating...

Pankaj

If you can obtain E-spacer, you should try it. It is expensive, so it may be prudent to obtain a sample from your colleagues if they have one and test it out first. I have spin-coated it on baked PMMA A4/A6 at ~2000 rpm, and the adhesion was fine. The dielectric substrate was mica, and I was able to get pretty decent EBL features (few hundred nm) with a moderate dose (~360 μC/cm^2 @ 20kV).

Are you trying to use the conductive polymer solely for the purposes of EBL on dielectric substrates?

Hi Tanuj,

Yes the purpose is just to perform EBL on dielectrics. Unfortunately we do not have ESpacer, only PEDOT at the moment.

Greetings, Maybe you want to bake it at 70oC for 10-15 min to remove any solvent from the thin film.

Hi Pankaj Sethi , are you solved the problem with the PEDOT on PMMA?. Becouse I have the same problem. The PEDOT don't wetting the surface of the PMMA.

Have you tried O2 plasma on the PMMA /Si before applying the PEDOT:PSS? Just be mindful that excess plasma treatment may remove your PMMA film completely. A few seconds may improve the adhesion between PEDOT:PSS and PMMA.

There are several types of PEDOT:PSS:

PEDOT:PSS Clevios HTL Solar should have better wettability than PEDOT:PSS Clevios PH 1000, at the price of less conductivity. (0.0012 Ω.cm vs 1 - 10 Ω.cm ).

The conductivity of PEDOT:PSS Clevios HTL Solar seems to be close to Espacer EP300 (0.7 S/cm).