I have XPS data for the V2p core level of V2O3, where V2p specta contains satellite peak. I want to calculate atomic percentage of V/O. My question is that, do I need to take into the area of the satellite peak to calculate the atomic percentage?
Exactly, agreeing with Dr. Greczynski, do not only thake both peaks as-is, with standard background; there you would want to specify peaks only from V such as V2p1/2 and V2p3/2; doing a peak fitting will give you the exact contribution of both V and O in your sample.
The emissions due to sattelite peaks of your x-ray source must not be included in the concentration evaluation as they stem from an emission with a different photon energy. Satelliten due to electronic excitations in the sample must be included. Best example are plasmon losses. Sometimes it is difficult to distinguish between sattelites and chemical shifts of stoichiometry deviations. Here only a very careful peak analysis will give good results.