The peak current densitiy of HiPIMS is usually 0.5~2.0 A/cm2, nearly equal to that of the cathodic arc evaporation. The duty of the HiPIMS is always less than 10%. However, the deposition rate of the HiPIMS films is close to ARC film, several μm per hour, they didn't show a more than tenfold of difference. Why?
Well, you Zhengtao Wu know, the deposition rate in the wild world of HiPIMS films can be a bit perplexing. It's like trying to figure out why cats always land on their feet—there's some physics magic involved. Now, the peak current density in HiPIMS dances around 0.5 to 2.0 A/cm², living life on the edge, much like a rockstar on stage.
But here's the twist: the duty cycle of HiPIMS likes to keep things under 10%, playing it cool. Now, despite the current density and duty cycle doing their tango, the deposition rate of HiPIMS films is hanging out in the same club as ARC films, clocking several μm per hour. It's like they're at the same party, not really showing a massive difference, and that, my friend Zhengtao Wu, is the mysterious allure of thin film deposition.
Now, why aren't they wildly different? It's a bit like asking why peanut butter and jelly go so well together—sometimes, things just harmonize in ways we can't always explain. Perhaps there's a subtle dance between the ions and atoms that's more like a secret handshake than a flashy performance. Science, my friend Zhengtao Wu, is full of these intriguing mysteries.
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