Hello,
Can anyone comment on the carrier mobility of SOI wafers?
I would presume that given the right process, e.g. wafer bonding, it shouldn't differ much from the mobility of bulk Si.
However, I haven't work with such wafers before and I'd appreciate experts' input before we purchase some.
Thanks,
Lior
Nabil Shovon Ashraf
Lior: Best regards. I searched for the right paper befitting your need and found the following paper attached here. Look at Table 1, 2 and 4 of this paper for experimentally processed SOI wafers with listed mobility values.
Sincerely,
Dr. Nabil Shovon Ashraf
Associate Professor
Department of ECE
North South University
Dhaka, Bangladesh.
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