Yes, you can use. But now a days, the most widely used software is SPSS Amos. You can use structural equation modeling approach to validate your model.
There is also an easy option for mediation and moderation. You can use "Process" macro developed by AF hayes
Hayes, A. F. (2013). Introduction to mediation, moderation, and conditional process analysis: A regression-based approach. Guilford Press.
you can find this Macro on the website of AF hayes and use it as a plug in in SPSS