What is the best way to measure a substrate temperature inside a plasma chamber ? So far, I have been considering IR and laser methods, but not sure what effect would it have on the reading because of the plasma.
Take care - all optical techniques will be influenced by the plasma. But indeed, IR spectroscopy is maybe off the plasma emission range and may work. Please post your experiences! Dirk
Dear ..
If your chamber is made from glass you are unable to measure the temperature because using IR , since IR not pass through the glass , and the other optical method will not give you the real temperature of you substrate
try to use j-type thermocaple and put it very near to your susbstrate
good luck
We use thermocouples to measure the temperature of samples in our chamber. One thing to look out for is that you need to have good thermal contact.
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