The thickness of the as deposited thin film can be calculated using weight difference method as
𝒕 =Δ𝒎/𝑨∗𝒅
Where
Δm is the mass difference of the substrate before and after deposition,
A is the respective area of the deposited film and
d is the bulk density of the deposited material.
if you need to calculate t then d i.e. bulk density should be known
But
d= mass/ volume
Volume= Area of deposited film * thickness ???? How to find it????
How to take the V olume or Thickness of the filmm?????
Dear Anil,
just by measurement the thickness of the wafer prior to deposition and afterwards.....
For the case of the mass of the film you have also done a reference measurement.
...what thickness range of films you are dealing with?
Sir,
I deal with the thickness about 250-500nm of material on 1cm square area, as thickness is small then in above fromula why there is bulk density d of the deposited materail can we take d=A ie area of the sample
0r we have certain constant values of d i.e. bulk density of each compound.
Dear Anil,
your film thickness range is quite a challenge for the Coating Thickness Gauges in your .pdf.
Looking at the span and the resolution of these systems I fear that they are not suitable for you.
If your film is transparent you may use optical techniques such as proposed in the following question: https://www.researchgate.net/post/How_could_I_measure_the_thickness_of_the_polymer_thin_film
However non-optical techniques a such as profilometer, AFM and SEM are also mentioned there; please have a look.
You might have access to the density via x-ray reflectivity; but I think a) your sample could not be suitable for that and b) it is a very high expenditure.
https://www.researchgate.net/post/How_to_determine_density_of_a_film_using_XRR_techniques.
In your case I think SEM would be the simplest thing, looking 'edge-on' onto your sample.
But you may share what type of film you deal with what is the substrate.
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