Can anyone tell me, what type of etchant used to etch Al metal after lithography?

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Ali Osman Cetinkaya

http://www.microchemicals.eu/technical_information/aluminium_etching.pdf

prof V.S Muralidharan

try dilute alkali

Tianchao Niu

You can refer to the references about the fabrication of AAO templates (Anodic aluminum oxide) for more detailed information.

Chirantan Das

The best and most simplest answer would be ortho-phosphoric acid and it is easily available in the market. For Al etching, mix it with ethanol in an optimized ratio (say OPA:Ethanol=3:7) to get better results.