Dear Shanmugam,

Use Origin software. Copy and paste the data from excel sheet (ASCII format) and plot it. Then select the whole data series, go to Analysis --> then peaks and baseline --> then multiple peak fit --> then select gaussian --> then fit the curve.

CasaXPS is not free but you can download and try it for free.

XPSPeak 4.1 is a good piece of free software (Windows OS only) for XPS peak fitting.

http://xpspeak.software.informer.com/4.1/

Hello Vinit,

I would suggest XPS peak 4.1 is open bound software with very easy user friendly tools to obtain XPS fitted spectra.

I support the recommendations above for XPSPeak4.1

I don't recommend using Origin as suggested above. While Origin is great for many things, it is not customized for XPS analysis and I don't believe that it can handle tasks such as Shirley background, Gaussian-Lorentzian peaks (and fitting the G/L ratio) etc.

Thanks for your valuable answers. I tried XPSPeak 4.1, but i couldn't find out any options for fitting in tat software. Can you please tell the steps . Herewith I attached the screenshot of used XPS PEAK4.1 software.

Hello Vinoth,

Please go through tutorials of this software which are available on youtube or their website......It is very easy to use.

Over 90% of the people I've spoken to (myself included) got stuck on this step. The software won't let you do anything before you add a background (background tab), and hit 'accept'. Then you can 'add peaks' and the rest is pretty much self explanatory. The mathematical fitting is easy - but to get a physically correct fit is not always straightforward and you need to know what you're doing or speak to someone who does.

I would agree in NOT using origin (or similar products) for XPS fitting - a simple Gaussian peak form may be suited for some selected elements in some special situations (like oxygen O1s peaks for oxides, etc), but even in those cases, the peaks may be a mixed Gaussian-Lorentzian, and the background substraction is a critical issue - as simple linear background might not be suited for compex peaks - consider e.g. an Ag 3d signal, with satellite peaks such as plasmons, and Kalpha 3,4 satellites ... you'll end up with 10 peaks for one spectrum - I feel that this cannot be done with origin and a linear background. At least a Shirley background is required here. So use any specialized software! Good luck, Dirk

For more easily, I can recommend you to use "casaxps" in http://www.casaxps.com/ , actually that software is not free but you can still use trial version and fitting with that, after your xps fitted, you can transfer the value of area, fwhm, and possition in casaxps to "xpspeak41" software, you can also see the manual of casaxps in youtube

XPSPEAK 4.1 is a good option, origin can also be use as well.

XPSPEAK 4.1

Download the software from the given link, https://public.wsu.edu/~pchemlab/index.html

Recently I found an excellent alternative software solution: https://veusz.github.io/

Dear Ramany

Thank you so much for sharing the link.

How to plot XPS survey graph using Origin

https://youtu.be/t2xrywy5988

anyone have XPS 4.1 software i am not able to find on given link

Hello Nisha Hiralal Makani , you can watch this video to download the software

https://www.youtube.com/watch?v=QJs90ZBpVa4

Some of the free software for fitting the XPS plots can be found at this link:

http://www.analyzetest.com/2021/03/12/free-software-for-xps-interpretation/