This question is asked in order to manufacture thin solid film on a glass substrate. I wish also to have responses on the principal precursors used in this technique.
SILAR process is a chemical solution deposition process. It is usually used to deposit thin films/ Qn. dots of sulphide compounds, both single and complex. The nature of precusors will depend on the material you want to synthsize. One of the main consitutents is Na2S for the source of sulphur. For the cation, you can use Chloride salts. I give you a reference below which will be useful to you:
Y. F. Nicolau and M. Dupuy, J. Electrochem. Soc., Vol. 137. No. 9, 1990, p2915