Dear Sir,Thank you very much for the detailed analysis and explanation and suggestions.This is very helpful.U are right,I deposited film using ALD .Starting materials were LiO^tBu (as Li source and TMPO (as a PO source) with Nitrogen plasma.I did'nt use any acid.I did'nt take FT-IR of starting materials.But I wonder,how acid got part in film.

Mahreen, I believe if you replace one the topic tags in your question with "li-ion battery" you will be able to attract more attention from a larger community. Just a thought!.

Please do let us know when you have solved your problem. And you are right -- your system should not have acid / water. I am curious :). Palash

May be the peak at 3370 is N-H bond because I have both ,nitrogen and hydrogen in the system.......

This is a complex task since the spectrum should be affected by the interference fringes of your substrate. What is the resolution of your measurements?

Have a look in the following papers

"Structure of fast ion conducting AgI-doped borate glasses in bulk and thin film forms", C.P. Varsamis, E.I. Kamitsos and G.D. Chryssikos,Phys. Rev. B 60, 3885 (1999)

“Infrared spectroscopy of Li-diborate glassy thin films”, E.I. Kamitsos, M. Dussauze, C.P.E. Varsamis, P. Vinatier and Y. Hamon, J. Non-Cryst. Solids 353, 1818 (2007)

“Thin film glassy electrolytes: structure and composition by experimental and simulated infrared spectra” , E.I. Kamitsos, M. Dussauze, C.P.E. Varsamis, P. Vinatier and Y. Hamon, J. Phys. Chem. C 111, 8111 (2007)

Best regards,

Christos