Can any one provide RSF(relative sensitivity factor) table for compound semiconductor :InP ?

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Yuriy Kudriavtsev

There are many RSFs in this book:

Secondary ion mass spectrometry: a practical handbook for depth profiling and bulk impurity analysis

R.G. Wilson, F.A. Stevie, C.W. Magee, Wiley, 1989 г. 384

https://books.google.ru/books?id=iPnvAAAAMAAJ&hl=ru&source=gbs_navlinks_s

Subhasis Das

Yuriy Kudriavtsev thank you.