Hello everyone,
I am looking for some recommendations of books covering physical vapor deposition such as sputtering and evaporation.
Both physical and e-books are welcome.
Thank you!
Dear Jason, my absolute favorite ist Milton Ohring, The Materials Science of Thin Films,
https://www.sciencedirect.com/book/9780125249751/materials-science-of-thin-films
An all-time Classic is Chopras Thin Film Phänomenal from 1969, but still you'll find valuable information
https://www.google.com/url?sa=t&source=web&rct=j&url=https://www.gbv.de/dms/ilmenau/toc/020732643.PDF&ved=2ahUKEwjmnf33m6H9AhVPCuwKHTk_Cl4QFnoECBIQAQ&usg=AOvVaw1_hNTFdEMOYqJueuDbVJqT
But there are plenty books in the market, and i would recommend Just to start and to find your own favorites, best regards, Dirk
1)The previous book by Maissel and Glang is the best,
2)Another very good book, "Glow discharge processes by Brian Chapman,
3) Thin film depsition processes by R. F. Bunshah (Pl. check the title)
4) Thin film phenomena by K.L.Chopra, is a very old book, not much detail.
Dirk Luetzenkirchen-Hecht and K. Sreenivas ,
Thank you so much for your suggestions! I'll look into whether I can get these for relatively cheap.
Best,
Jason
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