Automatic Silicon Wet Etch with KOH by using spinning?

13 September 2023 1 4K Report

I would like to buy an automatic spinner system for Si wafer etch with KOH by using spinning method at 85 C temperature. The KOH must be collected then will be reused. Is there a system like this?

Thomas Walther

Hi, I don't know about commercial solutions but combining a fast spinner with a powerful etch solution sounds like a really dangerous job as the etch could land everywhere - don't try this outside a completely closed fume cupboard. I would not even consider it inside a fume cupboard as cleaning it up afterwards will be a mess!

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