As in GaN after annealing the quality of gold markers degrades, how can I keep my markers quality same as before or improve it after annealing process?
What do you mean by quality of gold markers (alignment markers?)? Is that the surface morphology? Also, what type of contact is that? Schottky or Ohmic?
I have experienced degradation in ohmic contact morphology upon annealing. This is due to some complex interface reactions. However, in the areas on my substrate where the morphology did not degrade (or degrade much), the ohmic contact resistance was higher (non-ohmic in several cases), indicating such degradation is mandatory. Literature also suggest the same. So you cannot avoid degradation selectively at markers. Nonetheless, markers never posed problems for me during next lithography (alignment) process.
However, if you want smooth morphology of ohmic contact for a different reason, carryout another Au metallization on this.
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