It is claimed everywhere that PDMS can be bonded with silica-based materials, such as glass, quartz, and PDMS. I have successfully done PDMS-glass bonding with the following steps: 

1. Clean glass with Piranha and PDMS with acetone/IPA

2. Oxygen Plasma for 2min (50W)

3. Bond and cure for 15min at 90C oven

However, with the same recipe, I cannot bond PDMS with quartz. I believe the only difference is that quartz is 99% SiO2 while glass is less pure.

Is there any trick on bonding PDMS with quartz chip? 

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