It is claimed everywhere that PDMS can be bonded with silica-based materials, such as glass, quartz, and PDMS. I have successfully done PDMS-glass bonding with the following steps:
1. Clean glass with Piranha and PDMS with acetone/IPA
2. Oxygen Plasma for 2min (50W)
3. Bond and cure for 15min at 90C oven
However, with the same recipe, I cannot bond PDMS with quartz. I believe the only difference is that quartz is 99% SiO2 while glass is less pure.
Is there any trick on bonding PDMS with quartz chip?