Annealing of thin film in air using a Tube Furnace?

01 March 2025 1 9K Report

what is the procedure for annealing thin films in tube furnace? How should we vary the temperature?? N for much time should we leave the sample at the peak temperature?

Kiril A Pandelisev

Depending on the material the thin film was made of. And what you want to accomplish with it.

If you want to relieve built in stress, use 0.6-O.9 of the melting point. For instance, ion implant of silicon "healing" is between 700-900 C. Annealing GaAs is encapsulated and treated at 900-950 C.

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