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Questions related from Jerry Liu
When I was reading a optical coating book, most of the techniques introduced are based on PVD such as IAD Evaporation, sputtering, etc. Only a small portion is about CVD. Is PVD preferred over CVD...
06 June 2023 2,235 5 View
We are using SiO2/TiO2 as materials for AR coating. Due to the limit from the tool, the TiO2 index is always lower than target. I am wondering to switch to another low index material, MgF2 seems...
24 March 2023 6,776 1 View
Hello, What structures does Ebeam Evaporated TiO2 have? amorphous? Anatase? or Rutile? And is it possible to change the deposited film from one type to another by adjusting the Ebeam Evaporation...
16 January 2023 4,924 0 View
we have 10 nm SiO2 on 100 nm Al2O3 on a silicon wafer. No matter how I set the fitting model. the ellipsometer always consider SiO2 as the same material to Al2O3. The fitting result is 110nm...
16 November 2022 4,461 1 View
Among PECVD and Ebeam evaporation of SiO2 thim film, generally which method will give a better film quality in terms of density. and why?
10 October 2022 5,902 4 View
I used Semilab ellipsometer to measure a film(mostly silicon) from evaporation. it measured with 4 different angles. The model has a good fit with 75 65 and 60 measurement while the 70 is not...
29 August 2022 4,763 5 View
We have a RIE system that use 90%CF4 mixed with 10%O2 for SiO2 etching (gas is premixed). My question is how to setup a recipe that will give a straight(anisotropic) etching profile. I have four...
15 August 2022 7,070 5 View
