Ishan Varun

5 Questions 4 Answers 0 Followers

Questions related from Ishan Varun

How to resolve Incomplete Ti etch challenge in MEMS cavity?

Hi, We are facing a challenge of incomplete Titanium etch with H3PO4 (5min 70C). The cavities are partially opened in the 6-9 o'clock region near to the wafer edge on an 8" wafer. Can anyone help...

21 December 2023 7,256 0 View

How to deposit Tantalum oxide using Tantalum ethoxide and H2O as precursor in thermal ALD?

We have Savannah S200 thermal ALD system and we have recently purchased Tantalum ethoxide precursor for tantalum oxide (Ta2O5) deposition whose standard recipe is not available. If anyone is using...

22 July 2017 188 1 View

How to perform Pulsed I-V Mearsurement using Keithley 4200 SCS system without PMU card?

I am working on RRAM devices where pulsed I-V characterization is an important result to show the switching endurance of the devices. We have a Keithley 4200 SCS characterization system with SMU...

07 May 2017 8,532 7 View

How can we improve off/leakage current in M-I-M capacitors?

I am working on resistive switching based memory devices. In my devices, I get off current in the range of 1E-5-1E-4 which is very high. It deteriorates the Ion/Ioff and the hence the device...

21 November 2016 5,565 2 View

How to characterize RRAM devices to test its Retention and Endurance characteristics?

I have taken I-V characteristics of my RRAM devices but could not understand how to measure its retention time and endurance. Please suggest me the waveform which should be applied for retention...

27 September 2016 3,171 2 View