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Questions related from Cosimo Spagnolo
Is there any difference in etching InGaAs in BOE, in presence of light or dark?
11 May 2023 8,497 0 View
I cannot find what's the etch rate of InGaAs in H2SO4:H2O2:H2O and of InGaAs native oxide. Thanks in advance for help. Next question: what's the composition on InGaAs native oxide?
23 March 2023 8,306 1 View
Hi all, according to your knowledge, does it exist a station for wafer processing that is able to mix and perform etching with piranha solution? At the moment, the solution and the etching is done...
21 April 2022 1,114 2 View
The parameters to set are: - Pressure (in some papers I found little values, 5-15 mTorr, in other papers higher values, around 80 mTorr) - HF and ICP (in Watts, I guess ICP high and HF very low) -...
18 August 2021 1,141 2 View
