Why TiW forms a better barrier layer?

07 December 2022 1 8K Report

Hi, What is the crystal structure of a Titanium-Tungsten film? Titanium by itself is hexagonal close-packed (HCP) while Tungsten is body-centered cubic (BCC).

my other question, why is TiW is a better barrier while Ti is not? does this have to do with the packing/density of the atoms?

Thanks,

Emília Ucano

O titânio é o quarto metal e o nono elemento mais abundante da crosta terrestre. É um metal de transição do bloco d, reconhecido como um material com alta resistência mecânica (LEE et al., 1999). Tungsten is body-centered cubic (BCC).

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