In XPS analysis of my yttria doped sample, the peak area ratio of Y3d3/2 and Y3d5/2 are not matching with the theoretical ratio value(3:2). I tried with various baseline fitting (Shirley, Tougaard and linear baseline). The FWHM values are also different for the two peaks. For other elements, the FWHM of the the doublet peaks are equal and area ratios are matching with the theoretical ratios. Can anyone suggest why this is happening?

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