Hello,

I have measured the electrical resistivity of TiO2 thin films prepared on glass substrates by sol-gel and spin coating. The amorphous films dried at low temperature give ohmic behaviour and good resistivity (about 105 - 106 ohm cm).

After thermal annealing at different temperatures the values increase (even of orders of magnitude) and some films treated at 400 °C (crystallized as anatase) show no ohmic behaviour nor measurable resistivity.

I would expect an inverse trend, with denser and crystallized coatings more conductive than the low T dried ones.

I have observed a dependence of resistivity on thickness (and I know that films become thinner with annealing), but comparing films with the same thickness (e.g. about 50 nm) the amorphous ones still appear more conductive than the annealed ones.

What could be the explanation?

Resistivity was measured in a longitudinal geometry, with 2 parallel silver contacts drawn on the surface.

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