I would like to record the infrared spectrum (MIR, 4000-400 cm-1) of hybrid metal oxide films (e.g. TiO2), deposited by spin coating, with thickness around 100-200 nm.

Is ATR-IR (attenuated total reflectance) a suitable choice, or is another technique needed for thin films? What kind of substrate should I use?

Thank you in advance!

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