Hello everyone,
The copper film deposited on polyimide film (thermal evaporation) was treated with annealing in air (180oC, 3hr).
After XRD measurement, the metal copper peaks (at 43o and 51o) disappeared and the copper oxide peak (36.5o) formed. In the literature, we usually observed the crystallinity enhanced after annealing. I want to know a reason why the metal copper peaks were disappeared?
I think one possible explanation is that the metal copper transform into copper oxide. But is it possible all the metal copper transformed into copper oxide during the annealing? I think it should have the diffusion barrier, right?
Thanks a lot.
Yes it is possible for all the copper to get transformed into copper oxide, this depends on the copper film thickness.
If the film thickness of the copper is low enough, then it can get oxidised completely.
Note: The metallic copper has not disappeared, it is now transformed into copper oxide.
Why don't you reduce you annealing time to say 5 min at 180 deg C., and see if all the copper is transformed, or there is a mixture of copper and copper oxide using XRD.
Alternately reduce the annealing temp. and time till you see a mixture of Cu + CuO.
K. Sreenivas
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