but not the same electron beam, just a modified one.
It is a matter of penetration depth (x-rays vs electrons) and complexity and sensitivity of the experimental system, but also the handling. For the case of electrons please look for LEED on RHEED in the literature.
Electron beam represents a group of electrons instead of a single electron ... but X-ray plays role as single ... I hope, you will understand about the usage of X-ray instead of Electron beam.