I have done XRD scans of germanium that was deposited on silicon substrate and subsequently crystallized by laser annealing. In the case of theta-2-theta scan I observed a dominant substrate peak but could observe the peaks due to germanium too when I changed Y axis to log scale. In the case of grazing incidence I observed germanium peaks predominantly.

Which scan would be more accurate to calculate the crystallite size and percentage crystallinity from ?

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