I need to get FESEM images of nanostructures. I tried using SEM but images are not conclusive. The samples can not be fitted in HRSEM, so I feel that FESEM is the only option to get high resolution images.
Well, since H(igh)R(esolutionSEMs are usually based of some type of F(ieldE(mission)SEMs, I'm guessing with fitting you mean the sample is too big and not some other specifics? (Then it will not fit into TEM too, Muhammad)
I suggest revealing some more data or even an example of an image; answers are then usually more helpful. Like, since results are inclonclusive - the magnification was not sufficinetly high, or you performed some other alayses?
The magnification is not enough. The substrate is a metal plate 2cmX 2cm and 3mm thick. HRSEM which I know needs substrate to be 1mm thick. That is the reason I can not use that HRSEM.
Hm, OK, then it is the problem of sample / sample holder / manufacturer design. Can you share with us the manufacturer / model? Sometimes it's relatively easy to modify the holder, or even just grind off the excess sample.
PS just asking, since I'm rather sceptic about 1 mm tolerance, most of the goniometres known to me allow at least "few" mm Z-movement...
2. Any SEM/HRSEM/FESEM can accommodate thick specimens.
3. In-lense mode (the best for higher magnifications) may be not suitable for thicker specimens, however, standard mode is still available. Talk with your SEM operator.
4. TEM may give better results for nanostructures, but you have to prepare new specimen.