by the ac and dc votage applied to micro-heater of gas sensors.
votage increase= heating increase
voltage decrease= heating decrease
thanks for reply.. but how we coupled micro heater with Si wafer. If we purchased it from market.
I strongly recommend you to use “cementee resistor” 20Watt 5 Ohm as heater elements. Which is very feasible and cheap! It has electrically insulator case you can use thermal conductor jell or cream such as silicone grease. Air is a very poor conductor of heat. Thermal Interface Materials (TIM) can be up to a 100 times greater conductor of heat than air. Thermal paste is a very high heat conductive paste that is used between two objects (usually a heatsink and a CPU/GPU) to get better heat conduction. It fills in all those microscopic imperfections on the heatsink.
However, thermal paste is not near as good of a conductor as copper. Thus, too much thermal paste will hinder a heatsink’s ability to cool properly.
Types of Thermal Paste
There are essentially three types of thermal pastes:
1. Metal Based 2 .Ceramic Based 3 . Silicon Based
thanks a lot ..sir...but, when we used Si thermal paste to connect the heater, then it is possible to raise the temp. upto 400 C?
well I am sorry to say that " it is impossible" since generally that kind of thermal paste works well up to 440 Kelvin
there are different way:
screen printing and...
But I did not have semiconductor manufacturing project
do you an integradted heater or an heating support (external) ? it is not the same think.
with an external heater the maximum temperature may be 600°c with a special ceramic heater.
with an intergrated heater, this one muste be deposited before the sensitive layer.
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