What should be the acceleration voltage used for EDS analysis of oxidation coating on titanium?

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Vladimir Dusevich

For most EDS tasks you can use 15 kV voltage. If you want to optimize spatial resolution, work at voltage two times higher than excitation voltage of heaviest element in composition of your specimen (for Ti it's 10 kV). For optimizing of detection of light elements work at voltage of 5 kV or lower.

Noto Susanto Gultom

In addition to the accelerating voltage (in general 15 kV), you may consider increasing the probe current to about 10 uA. This will give you more signals and more accurate results.