You are right, it depends on the instrument, so you can ask your supplier in this case Thermo to provide you with a library in txt file to load in CasaXPS or simply a document with the values and you can enter them manually in the software. The Scofield library is a standard library, but it may not be the most accurate for your data.

Thanks so much Jhonatan Rodriguez-Pereira

Dear Sameera,

I recommend to thoroughly check the literature on quantitative XPS data analysis. There are many factors contributing to the intensity of an XPS peak, not only the "sensitivity factor" - I think we should and we have to use more precise wording! So I would speak about the photoionization cross section (such as the above-mentioned, calculated values by Scofield, with suited modifications such as the Reilman correction, that considers the geometry of excitation), and the spectrometer transmission function, which is dependent on the operation mode of the spectrometer (e.g. the values are different in CAE and CRR modes and may also be influence by the transfer lenses), the electron mean free path (see the papers by Tanuma, Powell & Penn for example).

So, in conclusion, life is unfortunately not simple, and you have to carefully consider the different calculation schemes and apply the one most suited for your instrument!

Good luck, Dirk

P.S. I would consider the manuals from John Grant and the "Practical Surface Analysis" book!

Dirk Luetzenkirchen-Hecht Thanks so much for your reply and for taking the time to provide a detailed answer.

Sam

Neal Fairley has a video "Quantification of Thermo Avantage Spectra in CasaXPS". I am attaching it for you.

John Grant

John T. Grant Thanks so much. The video is very helpful.