Hello

I have few quires about modelling NBTI Trapping/Detrapping Model Based on Predictive Technology Model (PTMs) firstly for CMOS and then FinFETs for smaller tech. nodes such as 16nm/22nm/32nm/45nm.

Q1: What material PTM (CMOS and FinFETs) models used for Gate-Oxide (e.g. Aluminium oxide Al₂O₃ or Hafnium oxide HfO₂ etc...)?

Q2: Based on above material, what is the typical trap density (i.e. number of traps/cm^2) for 16nm/22nm/32nm/45nm PTMs?

Q3: What is the typical Activation Energy (Ea) value for trapped charge emission? and what is its' range?

Thank you.

Usman

http://ptm.asu.edu/

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